Organometallic precursors and related methods
AssigneeEntegris, Inc.
InventorsThomas M. Cameron, David Kuiper, David M. Ermert, Thomas Coyne
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AssigneeEntegris, Inc.
InventorsThomas M. Cameron, David Kuiper, David M. Ermert, Thomas Coyne
Estimating the term…
Some embodiments relate to precursors (including intermediate precursors) and related methods. To prepare an intermediate precursor, a mixture of bis (arene) metal complexes is combined with a first arene. The mixture of bis (arene) metal complexes and the first arene are heated and subsequently cooled. Upon cooling, a bis (first arene) metal complex precipitates from solution to obtain an intermediate precursor with high purity. To prepare a precursor, the bis (first arene) metal complex is contacted with a second arene and heated to obtain a precursor with high purity.
A method for preparing a precursor, comprising:
A method for preparing a precursor comprising:
A composition comprising:
Dependencies are inferred from the claim text.