Measuring method, measuring device, and measuring system

A measuring device comprising:

• a disc-shaped base board;
• a sensor electrode provided on the base board;
• a temperature sensor provided on the base board;
• a radio frequency oscillator provided to apply a radio frequency signal to the sensor electrode;
• a C/V conversion circuit configured to generate a voltage signal corresponding to electrostatic capacitance formed by the sensor electrode;
• an A/D converter configured to convert the voltage signal output from the C/V conversion circuit into a digital value;
• an arithmetic device configured to calculate a measurement value representing the electrostatic capacitance formed by the sensor electrode, based on the digital value output from the A/D converter;
• and
• a phase adjustment circuit connected between the sensor electrode and the radio frequency oscillator,
• wherein the C/V conversion circuit has an amplifier circuit including an operational amplifier,
• the radio frequency oscillator is connected to a non-inversion input terminal of the operational amplifier such that the radio frequency signal is input to the non-inversion input terminal, and is connected to an inversion input terminal of the operational amplifier via the phase adjustment circuit, and
• the arithmetic device
• acquires a temperature by the temperature sensor at a first time, and acquires a first parameter that sets an admittance of the phase adjustment circuit in order to adjust the voltage signal output from the C/V conversion circuit to a reference point,
• acquires a second parameter that sets an admittance of the phase adjustment circuit corresponding to the temperature acquired at the first time, based on a second parameter group that is pre-stored and sets an admittance of the phase adjustment circuit by corresponding to each of a plurality of temperatures in order to adjust the voltage signal output from the C/V conversion circuit to the reference point,
• acquires a correction parameter group by correcting the second parameter group to correspond to the first parameter based on the first parameter and the second parameter, and
• acquires a correction parameter corresponding to a temperature, which is newly acquired by the temperature sensor, based on the correction parameter group at a second time after the first time, and adjusts the voltage signal output from the C/V conversion circuit to a reference point by setting the admittance of the phase adjustment circuit using the acquired correction parameter.

A measuring system in which a measurement value representing electrostatic capacitance is acquired by a measuring device in a chamber of a processing system, the measuring system comprising:

• the processing system;
• the measuring device;
• and one or more control devices configured to control operations of the processing system and the measuring device,
• wherein the processing system includes:
• a process module including a chamber body providing a first chamber, a stage provided in the first chamber and having the measuring device mounted thereon, and an edge ring disposed on the stage and mounted to surround a mounting region where the measuring device is mounted;
• a transfer module airtightly connected to the process module and including a decompression chamber configured to be decompressed and a transport device provided in the decompression chamber to transport the measuring device based on transport position data;
• and
• a keeping device airtightly connected to the decompression chamber and including a second chamber keeping the measuring device therein,
• the measuring device includes:
• a disc-shaped base board;
• a sensor electrode provided on the base board;
• a temperature sensor provided on the base board;
• a radio frequency oscillator provided to apply a radio frequency signal to the sensor electrode;
• a C/V conversion circuit configured to generate a voltage signal corresponding to electrostatic capacitance formed by the sensor electrode;
• an A/D converter configured to convert the voltage signal output from the C/V conversion circuit into a digital value;
• and
• a phase adjustment circuit connected between the sensor electrode and the radio frequency oscillator,
• the C/V conversion circuit has an amplifier circuit including an operational amplifier,
• the radio frequency oscillator is connected to a non-inversion input terminal of the operational amplifier such that the radio frequency signal is input to the non-inversion input terminal, and is connected to an inversion input terminal of the operational amplifier via the phase adjustment circuit, and
• the one or more control devices
• acquire a temperature by the temperature sensor at a first time, and acquires a first parameter that sets an admittance of the phase adjustment circuit in order to adjust the voltage signal output from the C/V conversion circuit to a reference point,
• acquire a second parameter that sets an admittance of the phase adjustment circuit corresponding to the temperature acquired at the first time, based on a second parameter group that is pre-stored and sets an admittance of the phase adjustment circuit by corresponding to each of a plurality of temperatures in order to adjust the voltage signal output from the C/V conversion circuit to the reference point,
• acquire a correction parameter group by correcting the second parameter group to correspond to the first parameter based on the first parameter and the second parameter,
• acquire a correction parameter corresponding to a temperature, which is newly acquired by the temperature sensor, based on the correction parameter group at a second time after the first time, and adjusts the voltage signal output from the C/V conversion circuit to a reference point by setting the admittance of the phase adjustment circuit using the acquired correction parameter, and
• calculate the measurement value representing the electrostatic capacitance formed by the sensor electrode based on the digital value output from the A/D converter, in a state where the voltage signal output from the C/V conversion circuit is adjusted to the reference point.