Monolithic particle inspection device

A monolithic inspection device, comprising:

• a receiver configured to receive coherent radiation from a radiation source;
• a focusing structure optically coupled to the receiver and configured to:
• generate a focused coherent radiation beam based on the coherent radiation,
• transmit the focused coherent radiation beam toward a region of a surface of a substrate, and
• receive photons scattered from the region in response to an illumination of the region by the focused coherent radiation beam;
• and
• a photodetector optically coupled to the focusing structure and configured to:
• measure the photons received by the focusing structure, and
• generate an electronic signal based on the measured photons.

A method, comprising:

• receiving, by a grating structure, coherent radiation from a radiation source;
• generating, by the grating structure, a focused coherent radiation beam based on the coherent radiation;
• transmitting, by the grating structure, the focused coherent radiation beam toward a region of a surface of a substrate;
• receiving, by the grating structure, photons scattered from the region in response to illuminating the region with the focused coherent radiation beam;
• measuring, by a photodetector, the photons received by the grating structure;
• and
• generating, by the photodetector, an electronic signal based on the measured photons.