Mems gyroscope

A micro-electro-mechanical system (MEMS) gyroscope, comprising:

• an anchor point unit;
• a sensing unit elastically connected with the anchor point unit;
• and
• a driving unit elastically connected with the anchor point unit and the sensing unit;
• wherein the MEMS gyroscope is in a shape of a rectangle;
• the anchor point unit comprises four corner anchor point structures arranged at four corners of the MEMS gyroscope and four central anchor points arranged in the MEMS gyroscope and spaced from the four corner anchor point structures;
• wherein the sensing unit comprises four first mass blocks, four second mass blocks, and four decoupling mass blocks;
• each of the four first mass blocks is elastically connected with a corresponding corner anchor point structure and a corresponding central anchor point and avoiding spaces are formed among the four first mass blocks, the four corner anchor point structures and the central anchor points;
• each of the four second mass blocks is arranged in a corresponding avoiding space;
• each of the four decoupling mass blocks is arranged in a corresponding avoiding space and is elastically connected with a corresponding second mass block;
• the four first mass blocks, the four second mass blocks and the four decoupling mass blocks are arranged within the MEMS gyroscope;
• each of the decoupling mass blocks is arranged opposite to an inner side of the corresponding second mass block;
• each two adjacent decoupling mass blocks are elastically connected with each other;
• wherein the driving unit comprises four driving pieces;
• each of the driving pieces is connected with an outer side of a corresponding second mass block;
• and two ends of each of the driving pieces are elastically connected with adjacent corner anchor point structures.