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US 2023/0264998 A1Published application
Ultrapure water production facility
AssigneeSamsung Electronics Co., Ltd.
InventorsEunhye PARK, Juhui PARK, Seyoon KIM, Jiyeon LEE
Life of this patent
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Abstract
An ultrapure water manufacturing facility includes: a supply line connected to a pure water storage tank and in which a plurality of pure water treatment devices are sequentially arranged; a branch line branched downstream of the supply line and connected to the pure water storage tank; and a first automatic valve connected to the branch line and configured to be actuated by a double-acting actuator.
Claims20
An ultrapure water manufacturing facility comprising:
- a supply line connected to a pure water storage tank and in which a plurality of pure water treatment devices are sequentially arranged;
- a branch line branched downstream of the supply line, and connected to the pure water storage tank;
- and
- a first automatic valve connected to the branch line and configured to be actuated by a double-acting actuator.
1 more element
An ultrapure water manufacturing facility comprising:
- a supply line connected to a pure water storage tank and in which a plurality of pure water treatment devices are sequentially arranged;
- a branch line branched downstream of the supply line, and connected to the pure water storage tank;
- a sub-branch line branched from the branch line and connected to a recovery facility;
- a first automatic valve connected to the branch line and located upstream of the pure water storage tank on the branch line;
- a second automatic valve connected to the sub-branch line and located upstream of the recovery facility on the sub-branch line;
- and
- a control device configured to control the first automatic valve and the second automatic valve,
- wherein the first automatic valve and the second automatic valve are on-off valves, and are configured to be actuated by double-acting actuators.
5 more elements
An ultrapure water manufacturing facility comprising:
- a pre-treatment facility including a first water storage tank configured to store water being treated and a plurality of first water treatment devices;
- a first make-up facility including a second water storage tank configured to store water being treated and a plurality of second water treatment devices;
- a second makeup device comprising a third water storage tank configured to store water being treated, a third water supply line configured to supply water being treated, the third water supply line being connected to the third water storage tank, and a plurality of third water treatment devices sequentially arranged in the third water supply line;
- and
- an ultrapure water production facility comprising a pure water storage tank, a supply line connected to the pure water storage tank, a plurality of pure water treatment devices sequentially arranged in the supply line, a branch line branched downstream of the supply line and connected to the pure water storage tank, a first automatic valve connected to the branch line, a sub-branch line branched from the branch line, and a second automatic valve connected to the sub-branch line,
- wherein the first automatic valve and the second automatic valve are configured to be actuated by double-acting actuators.
3 more elements
Dependencies are inferred from the claim text.