Ultrapure water manufacturing facility

An ultrapure water manufacturing facility comprising:

• a first tank;
• a heat exchanger arranged downstream of the first tank;
• a first filter and a second filter, which are sequentially arranged in the stated order downstream of the heat exchanger;
• a first reverse osmosis membrane arranged downstream of the second filter;
• a circulation unit comprising a first sub-tank and a first sub-reverse osmosis membrane, the circulation unit being configured to treat concentrated water of the first reverse osmosis membrane and circulate the concentrated water to the first tank;
• a second tank arranged downstream of the first reverse osmosis membrane;
• a first ultraviolet sterilizer arranged downstream of the second tank;
• a third filter arranged downstream of the first ultraviolet sterilizer;
• a second reverse osmosis membrane arranged downstream of the third filter;
• an electrodeionization device arranged downstream of the second reverse osmosis membrane;
• a third tank arranged downstream of the electrodeionization device;
• a second ultraviolet sterilizer arranged downstream of the third tank;
• an ion exchange resin tower arranged downstream of the second ultraviolet sterilizer and filled with a boron selective resin;
• a membrane degasifier arranged downstream of the ion exchange resin tower;
• and
• a chemical supplier configured to supply a pH regulator to treatment-target water flowing from the second tank to the first ultraviolet sterilizer.

An ultrapure water manufacturing facility comprising:

• a pre-treatment facility, which comprises a first tank, a first reverse osmosis membrane arranged downstream of the first tank, and a circulation unit comprising a first sub-reverse osmosis membrane, the circulation unit being configured to treat concentrated water of the first reverse osmosis membrane and circulate the concentrated water to the first tank;
• a first make-up facility, which comprises a second tank, a second reverse osmosis membrane arranged downstream of the second tank, an electrodeionization device arranged downstream of the second reverse osmosis membrane, and a chemical supplier configured to supply a pH regulator to treatment-target water flowing from the second tank to the second reverse osmosis membrane;
• a second make-up facility, which comprises a third tank, an ion exchange resin tower arranged downstream of the third tank and filled with a boron selective resin, and a first degasifier arranged downstream of the ion exchange resin tower;
• and
• a polishing facility, which comprises a fourth tank, a first polisher arranged downstream of the fourth tank, a second degasifier arranged downstream of the first polisher, a second polisher arranged downstream of the second degasifier, and an ultrafiltration membrane arranged downstream of the second polisher.