Replacing apparatus and replacing method
AssigneeTokyo Electron Limited
InventorsYasutaka MIZOMOTO, Susumu HAYAKAWA
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AssigneeTokyo Electron Limited
InventorsYasutaka MIZOMOTO, Susumu HAYAKAWA
Estimating the term…
A replacing apparatus is configured to replace a processing tool in a processing apparatus. The processing apparatus includes a holder configured to hold a processing target object, a processing mechanism to which the processing tool configured to process the processing target object held by the holder is installed in a replaceable manner, and an exterior cover accommodating therein the holder and the processing mechanism. The replacing apparatus includes a replacing mechanism, a moving mechanism, a traveling table and a traveling mechanism. The replacing mechanism installs the processing tool to the processing mechanism, or separates the processing tool from the processing mechanism. The moving mechanism is configured to move the replacing mechanism from an outside of the exterior cover to an inside thereof through an entrance opening of the exterior cover. The traveling table supports the moving mechanism. The traveling mechanism is configured to allow the traveling table to travel.
A replacing apparatus configured to replace a processing tool in a processing apparatus including a holder configured to hold a processing target object, a processing mechanism to which the processing tool configured to process the processing target object held by the holder is installed in a replaceable manner, and an exterior cover accommodating therein the holder and the processing mechanism, the replacing apparatus comprising:
A replacing method of replacing a processing tool in a processing apparatus including a holder configured to hold a processing target object, a processing mechanism to which the processing tool configured to process the processing target object held by the holder is installed in a replaceable manner, and an exterior cover accommodating therein the holder and the processing mechanism, the replacing method comprising:
Dependencies are inferred from the claim text.