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US 2023/0264266 A1Published application
Processing system
AssigneeNikon Corporation
InventorsToshimitsu KURAMI, Zhi-Wei LIN, Yoon Jung JEONG, Michael Birk BINNARD
Life of this patent
Estimating the term…
Abstract
A processing system includes: an irradiation system that irradiates an object with an energy beam; a material supply member that supplies a build material irradiated with the energy beam; a measurement apparatus that obtains information related to a height of a surface of the object; and a distance change apparatus that changes a distance between the material supply member and the surface based on a measured result by the measurement apparatus.
Claims64
1-49. (canceled)
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- a measurement apparatus that obtains information related to a height of a surface of the object;
- and
- a distance change apparatus that changes a distance between the material supply member and the surface based on a measured result by the measurement apparatus,
- the distance change apparatus being configured to change the distance between the material supply member and the surface so that the material supply member moves toward one direction relative to the surface when the height of the surface is lower than a desired height and to change the distance between the material supply member and the surface so that the material supply member moves toward another direction opposite to the one direction relative to the surface when the height of the surface is higher than the desired height.
3 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- a measurement apparatus that obtains information related to a height of a surface of the object;
- and
- a distance change apparatus that changes a distance between the material supply member and the surface based on a measured result by the measurement apparatus.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- a measurement apparatus that obtains information related to a height of a surface of the object;
- and
- a direction change apparatus that changes a direction of the material supply member based on a measured result by the measurement apparatus.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- a measurement apparatus that obtains information related to a height of a surface of the object;
- and
- a material supply control apparatus that changes a supplied amount of the build object based on a measured result by the measurement apparatus.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- a measurement apparatus that obtains information related to a height of a surface of the object;
- and
- a material supply control apparatus that controls the material supply member based on a measured result by the measurement apparatus.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- and
- a distance change apparatus that changes a distance between the material supply member and a surface of the object to increase it when a height of the surface is lower than a desired height.
1 more element
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- and
- a concentration area change apparatus that changes a distance between a surface of the object and a concentration area of the build material supplied by the material supply member to decrease it when a height of the surface of the object is lower than a desired height.
1 more element
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- and
- a control apparatus that performs a control so that a concentration area of the build material when a height of a surface of the object is lower than a desired height is located above a concentration area of the build material when the height of the surface is higher than the desired height.
1 more element
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- a measurement apparatus that obtains information related to a position of a surface of the object;
- and
- a control apparatus that changes a converged position of the energy beam by controlling the irradiation system based on a measured result by the measurement apparatus.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- and
- a measurement apparatus that obtains information related to a height of a surface of the object,
- a relative position between a terminal optical element of the irradiation system and the material supply member being changeable.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- and
- a measurement apparatus that obtains information related to a height of a surface of the object,
- a relative position between the measurement apparatus and the material supply member is changeable.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- and
- a measurement apparatus that obtains information related to a height of a surface of the object,
- a relative directional relationship between a terminal optical element of the irradiation system and the material supply member being changeable.
2 more elements
A processing system comprising:
- an irradiation system that irradiates an object with an energy beam;
- a material supply member that supplies a build material irradiated with the energy beam;
- and
- a measurement light irradiation apparatus that emits a measurement light for obtaining information related to a height of a surface of the object,
- a relative directional relationship between the measurement light irradiation apparatus and the material supply member being changeable.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- obtaining information related to a height of a surface of the object by using a measurement apparatus;
- and
- changing a distance between the material supply member and the surface based on a measured result by the measurement apparatus,
- changing the distance the material supply member and the surface including changing the distance between the material supply member and the surface so that the material supply member moves toward one direction relative to the surface when the height of the surface is lower than a desired height and to change the distance between the material supply member and the surface so that the material supply member moves toward another direction opposite to the one direction relative to the surface when the height of the surface is higher than the desired height.
3 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- obtaining information related to a height of a surface of the object by using a measurement apparatus;
- and
- changing a distance between the material supply member and the surface based on a measured result by the measurement apparatus.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- obtaining information related to a height of a surface of the object by using a measurement apparatus;
- and
- a direction of the material supply member based on a measured result by the measurement apparatus.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- obtaining information related to a height of a surface of the object by using a measurement apparatus;
- and
- changing a supplied amount of the build object based on a measured result by the measurement apparatus.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- obtaining information related to a height of a surface of the object by using a measurement apparatus;
- and
- controlling the material supply member based on a measured result by the measurement apparatus.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- and
- changing a distance between the material supply member and a surface of the object to increase it when a height of the surface is lower than a desired height.
1 more element
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- and
- changing a distance between a surface of the object and a concentration area of the build material supplied by the material supply member to decrease it when a height of the surface of the object is lower than a desired height.
1 more element
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- and
- performing a control so that a concentration area of the build material when a height of a surface of the object is lower than a desired height is located above a concentration area of the build material when the height of the surface is higher than the desired height.
1 more element
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- obtaining information related to a position of a surface of the object by using a measurement apparatus;
- and
- changing a converged position of the energy beam by controlling the irradiation system based on a measured result by the measurement apparatus.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- and
- obtaining information related to a height of a surface of the object by using a measurement apparatus,
- a relative position between a terminal optical element of the irradiation system and the material supply member being changeable.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- and
- obtaining information related to a height of a surface of the object by using a measurement apparatus,
- a relative position between the measurement apparatus and the material supply member is changeable.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- and
- obtaining information related to a height of a surface of the object by using a measurement apparatus,
- a relative directional relationship between a terminal optical element of the irradiation system and the material supply member being changeable.
2 more elements
A processing method comprising:
- irradiating an object with an energy beam by using an irradiation system;
- supplying a build material irradiated with the energy beam by using a material supply member;
- and
- obtaining information related to a height of a surface of the object by using a measurement apparatus,
- a relative directional relationship between a terminal optical element of the irradiation system and the material supply member being changeable.
2 more elements
Dependencies are inferred from the claim text.