Device Having Cleaning Bodies

A cleaning device, comprising

• a carrier,
• wherein said carrier has a cylindrical shape;
• a sleeve unit is obtained in center of said carrier;
• and said sleeve unit is assembled with an actuating device;
• and
• a cleaning unit,
• wherein said cleaning unit comprises a plurality of cleaning bodies arranged on a surface of said carrier;
• said cleaning bodies are trapezoidal cylinders;
• each of the cleaning bodies has a first surface and two inclined planes;
• said first surface is parallel to a surface of said carrier;
• said two inclined planes are faced toward circumference of said carrier and separately located between adjacent two of said cleaning bodies;
• said first surface of said cleaning body has a distance of 6.5 millimeters (mm) to said surface of said carrier with 10 percent (%) tolerance (±10%);
• and said two inclined planes at two sides have an angle of 50 degrees±10% in between,
• wherein, as any one of said cleaning bodies starts contacting a wafer, one of said inclined planes at a side is deformed as a beginning;
• as follows, a trend of gentle changes in area is obtained from initial contacting until final departing between said one of said cleaning bodies and said wafer;
• and said wafer is thus stably forced with cleaning ability of scrubbing and surface friction of said wafer.