Method and device for monitoring production equipment and storage medium
AssigneeChangxin Memory Technologies, Inc.
InventorShanshan HUA
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AssigneeChangxin Memory Technologies, Inc.
InventorShanshan HUA
Estimating the term…
A method and device for monitoring production equipment and a storage medium includes: a measurement result of production equipment to be monitored is acquired; the measurement result of the production equipment to be monitored is evaluated on at least one evaluation dimension to obtain an evaluation result on each evaluation dimension; and a production state of the production equipment to be monitored is determined based on the evaluation result on the at least one evaluation dimension. The production state includes a normal state and an abnormal state. The at least one evaluation dimension includes at least one of a process level of products, a statistical significance of products or a distribution trend of products.
A method for monitoring production equipment, applied to a monitoring device and comprising:
A device for monitoring production equipment, comprising
A non-transitory computer-readable storage medium having stored therein a computer program which is executed by a processor to implement the following operations:
Dependencies are inferred from the claim text.