Heat-resistant cushioning sheet and thermocompression treatment method

Abstract

A provided heat-resistant cushioning sheet is a sheet configured to be disposed between a thermocompression face of a thermocompression apparatus and a target in a thermocompression treatment of the target, and includes: a substrate including a fluorine resin; and a coating layer including a heat-resistant resin and disposed on a one principal surface side of the substrate. One exposed surface of the heat-resistant cushioning sheet is formed by the coating layer. The heat-resistant resin is a resin other than a fluorine resin and has a melting point of 280° C. or higher and/or a glass transition temperature of 210° C. or higher. The provided heat-resistant cushioning sheet is well adapted to expected further increases in treatment temperature and pressure.

Dependencies are inferred from the claim text.