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US 2023/0154768 A1Published application
Multi-zone azimuthal heater
AssigneeWatlow Electric Manufacturing Company
InventorsKevin SMITH, Paul VALACHOVIC
Life of this patent
Estimating the term…
Abstract
A heater assembly includes a substrate, a plurality of resistive heating elements disposed along a perimeter of the substrate, and a common ground electrical lead connected to at least some of the plurality of resistive heating elements and having a portion extending along the perimeter of the substrate. The plurality of resistive heating elements are independently controllable to provide azimuthal temperature control of the heater assembly.
Claims20
A heater assembly comprising:
- a substrate;
- a plurality of resistive heating elements disposed along a perimeter of the substrate;
- and
- a common ground electrical lead connected to at least some of the plurality of resistive heating elements and having a portion extending along the perimeter of the substrate,
- wherein the plurality of resistive heating elements are independently controllable to provide azimuthal temperature control of the heater assembly.
2 more elements
A thermal system comprising:
- a controller;
- a substrate;
- and
- a plurality of resistive heating elements disposed along a perimeter of the substrate, each of the plurality of resistive heating elements having opposing ends along the perimeter of the substrate;
- and
- a common ground electrical lead connected to at least some of the plurality of resistive heating elements and having a portion extending along the perimeter of the substrate,
- wherein the plurality of resistive heating elements are independently controllable to provide azimuthal temperature control of the substrate.
4 more elements
A heater assembly comprising:
- a pedestal including a substrate and a shaft connected to a central portion of the substrate;
- a plurality of resistive heating elements disposed along a perimeter of the substrate, each of the plurality of resistive heating elements having opposing ends along the perimeter of the substrate;
- a common ground electrical lead connected to all of the resistive heating elements and extending through the shaft;
- a plurality of electrical leads connected to the plurality of resistive heating elements and extending through the shaft,
- wherein the plurality of resistive heating elements are independently controllable to provide azimuthal temperature control of the heater assembly.
2 more elements
Dependencies are inferred from the claim text.