Inertial measurement unit
AssigneeSeiko Epson Corporation
InventorToru Watanabe
Life of this patent
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Abstract
An inertial measurement unit includes: a substrate; a sealing member; a first inertial sensor module including a first inertial sensor and a first package accommodating the first inertial sensor; and a second inertial sensor module including a second inertial sensor and a second package accommodating the second inertial sensor. A material of the first package includes a resin. A material of the second package is an inorganic material. The first inertial sensor module is accommodated in a space between the substrate and the sealing member and thus airtightly sealed therein. The second inertial sensor module is provided outside the space.
Claims11
An inertial measurement unit comprising:
- a substrate;
- a sealing member;
- a first inertial sensor module including a first inertial sensor and a first package accommodating the first inertial sensor;
- and
- a second inertial sensor module including a second inertial sensor and a second package accommodating the second inertial sensor, wherein
- a material of the first package includes a resin,
- a material of the second package is an inorganic material,
- the first inertial sensor module is accommodated in a space between the substrate and the sealing member and thus airtightly sealed therein, and
- the second inertial sensor module is provided outside the space.
Dependencies are inferred from the claim text.