Loading apparatus for deposition mask
AssigneeSamsung Display Co., Ltd.
InventorsKyongho HONG, Myungkyu KIM, Chang-Kon PARK, Sukbeom YOU, Dongjae LEE
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Abstract
A loading apparatus for a deposition mask includes a clamper that clamps the mask extending in a direction, a first adsorption part, a second adsorption part, and a connection part connected to the first adsorption part and the second adsorption part, and includes a picker that transfers the mask. In case that the picker transfers the mask, the first adsorption part adsorbs ends of the mask, the second adsorption unit adsorbs a portion between the ends of the mask, and the clamper clamps the mask between the first adsorption part and the second adsorption part.
Claims20
A loading apparatus for a deposition mask, the loading apparatus comprising:
- a clamper that clamps a mask extending in a first direction;
- and
- a picker including:
- a first adsorption part;
- a second adsorption part;
- and
- a connection part connected to the first adsorption part and the second adsorption part, and transferring the mask to the clamper, wherein
- in case that the picker transfers the mask, the first adsorption part adsorbs ends of the mask and the second adsorption part adsorbs a portion between the ends of the mask, and
- the clamper clamps the mask between the first adsorption part and the second adsorption part.
Dependencies are inferred from the claim text.