US 2023/0143962 A1 · SEED LASER SYSTEM FOR RADIATION SOURCE

Abstract

Systems, apparatuses, and methods are provided for dual-pass amplification of laser beams along a common beam path. An example method can include generating a first laser beam and a second laser beam. Subsequently, the example method can include performing dual-pass amplification of the first laser beam and the second laser beam along a common beam path. In some aspects, the first laser beam can include a first wavelength, the second laser beam can include a second wavelength different from the first wavelength.

Claims20

Dependent claims

A radiation source, comprising:

a laser system comprising:
a first laser source configured to generate a first laser beam;
a second laser source configured to generate a second laser beam;
and
a dual-pass amplifier configured to:
perform dual-pass amplification of the first laser beam along a common beam path;
and
perform dual-pass amplification of the second laser beam along the common beam path.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/913,013Filed 10 Mar 2021

Priority

9 Apr 2020

Published

11 May 2023

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

H01S 3/2333
Multi-pass amplifiers, e.g. regenerative amplifiers: double-pass amplifiers
H01S 3/0085
Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser…
H01S 3/1003
By functional association of additional optical elements, e.g. filters, gratings, reflectors: tunable optical elements, e.g. acousto-optic…
H01S 3/2232
The active gas being polyatomic, i.e. containing two or more atoms: carbon dioxide or monoxide [CO]

Seed laser system for radiation source

Life of this patent

Seed laser system for radiation source

Life of this patent

Abstract

Claims20