Vapor cells and related systems and methods
AssigneeMicrochip Technology Incorporated
InventorsRobert Lutwak, Bomy Chen
Life of this patent
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Abstract
Vapor cells may include a body including a cavity within the body. A first substrate bonded to a second substrate at an interface within the body, at least one of the first substrate, the second substrate, or an interfacial material between the first and second substrates may define at least one recess or pore in a surface. A smallest dimension of the at least one recess or pore may be about 500 microns or less, as measured in a direction parallel to at least one surface of the first substrate partially defining the cavity.
Claims23
A vapor cell, comprising:
- a body defining a cavity within the body, the body comprising a first substrate bonded to a second substrate at an interface, a first window located on a side of the first substrate opposite the second substrate, and a second window located on a side of the second substrate opposite the first substrate;
- at least one of the first substrate, the second substrate, or an interfacial material between the first substrate and the second substrate, defining at least one recess or pore, a smallest dimension of the at least one recess or pore being about 500 microns or less, as measured in a direction parallel to at least one surface of the first substrate partially defining the cavity, the at least one recess or pore distanced from the first window and the second window.
A method of making a vapor cell, comprising:
- providing a body, the body comprising a first substrate bonded to a second substrate at an interface, a first window located on a side of the first substrate opposite the second substrate, and a second window located on a side of the second substrate opposite the first substrate;
- defining a cavity within the body;
- and
- forming, in at least one of the first substrate, the second substrate, or an interfacial material between the first substrate and the second substrate, at least one pore or recess having a smallest dimension of about 500 microns or less, as measured in a direction parallel to at least one surface of the first substrate partially defining the cavity, the at least one recess or pore distanced from the first window and the second window.
A system, comprising:
- an emitter positioned and oriented to direct radiation through windows of a vapor cell;
- and
- a detector positioned and oriented to detect the radiation;
- wherein the vapor cell comprises a body defining a cavity within the body, the body comprising:
- a first substrate bonded to a second substrate at an interface;
- a first window located on a side of the first substrate opposite the second substrate;
- and
- a second window located on a side of the second substrate opposite the first substrate,
- wherein at least one of the first substrate, the second substrate, or an interfacial material between the first substrate and the second substrate defines at least one pore or recess having a smallest dimension of about 500 microns or less, as measured in a direction parallel to at least one surface of the first substrate partially defining the cavity, the at least one recess or pore distanced from the first window and the second window.
Dependencies are inferred from the claim text.