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US 2023/0141911 A1Published application
Substrate processing system
AssigneeTokyo Electron Limited
InventorDai KITAGAWA
Life of this patent
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Abstract
A substrate processing system is installable in a small installation area. The substrate processing system includes one or more process modules and a vacuum transfer module. At least one of the one or more process modules and the vacuum transfer module at least partially overlap with each other as viewed from above.
Claims20
A substrate processing system, comprising:
- one or more process modules configured to process a substrate therein;
- and
- a vacuum transfer module configured to transfer the substrate within a vacuum atmosphere into the one or more process modules,
- wherein at least one of the one or more process modules and the vacuum transfer module at least partially overlap with each other as viewed from above.
1 more element
Dependencies are inferred from the claim text.