Coater cup deformation testing device and method of coater cup deformation testing

A method of coater cup deformation testing, comprising:

• providing a coater cup deformation testing device, wherein the coater cup deformation testing device comprises a supporting board, a first plate and a second plate, the first plate and the second plate are circular, the first plate is disposed on a first side surface of the supporting board, the second plate is disposed on the first plate or on a second side surface of the supporting board, the second side surface is opposite to the first side surface, a diameter of the second plate is less than a diameter of the first plate;
• disassembling a coater cup device, wherein the coater cup device comprises a bottom cup, an upper cup and an inner cup, the inner cup rotatably disposed on the bottom cup to support a semiconductor wafer, the upper cup and the bottom cup form a space accumulating the semiconductor wafer supported by the inner cup within the space;
• receiving the bottom cup by the first plate of the coater cup deformation testing device;
• and
• receiving the upper cup by the second plate of the coater cup deformation testing device.