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US 2023/0134254 A1Published application
Blade, processing system and processing method
AssigneeNikon Corporation
InventorShinji SATO
Life of this patent
Estimating the term…
Abstract
A blade (BL) is a blade that is used in fluid and includes : a base member (BM); and a coat layer (TBC) that is formed on the base member, a plurality of first grooves (9) and a plurality of second grooves (7) are formed on a surface of the coat layer, a pitch (P9) of the plurality of first grooves is different from a pitch (P7) of the plurality of second grooves.
Claims26
1-72. (canceled)
A blade that is used in fluid,
- the blade comprising:
- a base member;
- and
- a coat layer that is formed on the base member,
- a plurality of first grooves each of which has a first depth and a plurality of second grooves each of which has a second depth that is larger than the first depth being formed on a surface of the coat layer,
- a pitch of the plurality of first grooves being smaller than a pitch of the plurality of second grooves.
3 more elements
A processing system comprising:
- a beam irradiation apparatus that is configured to irradiate a surface of a coat layer, which is formed on a base member and on which a plurality of second grooves each of which has a second depth are formed, with an energy beam;
- and
- a control apparatus that is configured to control the beam irradiation apparatus to form a plurality of first grooves each of which has a first depth that is smaller than the second depth on the surface of the coat layer at a pitch that is smaller than a pitch of the plurality of second grooves.
A processing method comprising:
- forming a plurality of second grooves each of which has a second depth on a surface of a coat layer formed on a base member;
- and
- forming a plurality of first grooves each of which has a first depth that is smaller than the second depth on the surface of the coat layer at a pitch that is smaller than a pitch of the plurality of second grooves.
Dependencies are inferred from the claim text.