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US 2023/0130998 A1Published application
Photoacid generator and photoresist composition including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYechan KIM, Hyunwoo KIM, Jicheol PARK, Honggu IM
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Abstract
A photoacid generator (PAG) and a photoresist composition including the PAG, the PAG being represented by Formula I below,
Claims20
A photoacid generator (PAG) represented by Formula I below,
- wherein in Formula I,
- L is S or I, and when L is I, R3 is omitted,
- R1, R2, and R3 are each independently a C1 to C10 alkyl group, C1 to C10 alkoxy group, a C2 to C10 alkenyl group, a C2 to C10 alkynyl group, a C6 to C18 aryl group, a C7 to C18 arylalkyl group, or a C7 to C18 alkylaryl group, each of which is substituted with a heteroatom or intervened with a heteroatom,
- two of R1, R2, and R3 are bonded to each other to form a ring together with L,
- B1 includes two or more ester groups, and is a monovalent or divalent hydrocarbon group which is substituted with a heteroatom or intervened with a heteroatom,
- B2 is a monovalent or divalent C1 to C20 hydrocarbon group which is substituted with a heteroatom or intervened with a heteroatom, and
- T is an acid-sensitive group.
4 more elements
A photoacid generator represented by Formula IV below,
- wherein in Formula IV,
- L is S or I, and when L is I, R3 is omitted,
- R1, R2, and R3 are each independently a C1 to C10 alkyl group, a C1 to C10 alkoxy group, a C2 to C10 alkenyl group, a C2 to C10 alkynyl group, a C6 to C18 aryl group, a C7 to C18 arylalkyl group, or a C7 to C18 alkylaryl group, each of which is substituted with a heteroatom or intervened with a heteroatom,
- two of R1, R2, and R3 are bonded to each other to form a ring together with L,
- B1 includes three or more ester groups, and is a monovalent or divalent hydrocarbon group which is substituted with a heteroatom or intervened with a heteroatom,
- B2 and B3 are each independently a monovalent or divalent C1 to C20 hydrocarbon group which is substituted with a heteroatom or intervened with a heteroatom, and
- T1 and T2 are each independently an acid-sensitive group.
4 more elements
A photoresist composition, comprising:
- a photosensitive resin;
- a photoacid generator represented by Formula I, below;
- and
- a solvent capable of dissolving the photosensitive resin and the photoacid generator,
- wherein in Formula I,
- L is S or I, and when L is I, R3 is omitted,
- R1, R2, and R3 are each independently a C1 to C10 alkyl group, C1 to C10 alkoxy group, a C2 to C10 alkenyl group, a C2 to C10 alkynyl group, a C6 to C18 aryl group, a C7 to C18 arylalkyl group, or a C7 to C18 alkylaryl group, each of which is substituted with a heteroatom or intervened with a heteroatom,
- two of R1, R2, and R3 are bonded to each other to form a ring together with L,
- B1 includes two or more ester groups, and is a monovalent or divalent hydrocarbon group which is substituted with a heteroatom or intervened with a heteroatom,
- B2 is a monovalent or divalent C1 to C20 hydrocarbon group which is substituted with a heteroatom or intervened with a heteroatom, and
- T is an acid-sensitive group.
8 more elements
Dependencies are inferred from the claim text.