Setup method
AssigneeDisco Corporation
InventorsTakenobu MORI, Mai HANEDA, Atsushi NAKATSUKA, Atsushi TAKAGI
Life of this patent
Estimating the term…
Abstract
Stored is a height of a grinding mechanism when lower surfaces of grinding stones have come into contact with an upper surface of a wafer held on a holding surface, through lowering of the grinding mechanism from above the wafer. Based on this height, an origin point height which is a height of the grinding mechanism when the lower surfaces of the grinding stones have come into contact with the holding surface is then determined.
Claims4
A method for setting up a grinding apparatus, the grinding apparatus including a chuck table that holds a plate-shaped workpiece on a holding surface thereof, a grinding mechanism that has grinding stones mounted thereon and grinds, with the grinding stones, the plate-shaped workpiece held on the holding surface, a lift mechanism that moves the grinding mechanism in a direction vertical to the holding surface, and a height ascertainment device that ascertains a height of the grinding mechanism moved with the lift mechanism, by moving the grinding mechanism by the lift mechanism and storing the height of the grinding mechanism when lower surfaces of the grinding stones come into contact with the holding surface,
- the grinding mechanism including a contact detection section configured to detect contact of the lower surfaces of the grinding stones with an upper surface of the plate-shaped workpiece,
- the method comprising:
- a holding step of holding the plate-shaped workpiece on the holding surface of the chuck table so that a cushioning portion is disposed between a central area of a lower surface of the plate-shaped workpiece and the holding surface;
- and
- a storing step of storing the height of the grinding mechanism when the lower surfaces of the grinding stones are ascertained through detection by the contact detection section to have come into contact with the upper surface of the plate-shaped workpiece that is held on the holding surface, by lowering of the grinding mechanism with the grinding stones mounted thereon from above the plate-shaped workpiece held on the holding surface.
Dependencies are inferred from the claim text.