Fused quartz crucible for producing silicon crystals, and method for producing a fused quartz crucible
AssigneeSiltronic AG
InventorsToni LEHMANN, Dirk ZEMKE
Life of this patent
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AssigneeSiltronic AG
InventorsToni LEHMANN, Dirk ZEMKE
Estimating the term…
A fused quartz crucible for pulling a single crystal of silicon by the Czochralski technique, has an inner side with an inner layer of fused quartz that forms a surface, the inner layer being provided with a crystallization promoter which on heating of the fused quartz crucible during use, in crystal pulling, causes crystallization of fused quartz to form b-cristobalite, wherein the concentration C of synthetically obtained SiO2 at a distance d from the surface is greater than the concentration of synthetically obtained SiO2 at a distance d2 from the surface, where d2 is greater than d. Multiple crystals can be grown while maintaining high crystal quality.
-15. (canceled)
A fused quartz crucible for pulling a single crystal of silicon according to the Czochralski technique, comprising:
Dependencies are inferred from the claim text.