Gas component detection device
AssigneeMurata Manufacturing Co., Ltd.
InventorsHideki ISHIDA, Takao TSUDA
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AssigneeMurata Manufacturing Co., Ltd.
InventorsHideki ISHIDA, Takao TSUDA
Estimating the term…
A gas component detection device includes a column, a sensor, a flow path, and a flow path switch. The column separates a component of gas to be detected. The sensor is, for example, a semiconductor sensor, is connected to the downstream side of the column, and detects a component of gas to be detected. The flow path connects the column and the sensor. The flow path switch is arranged between a flow path and a flow path. The flow path switch switches between and executes a measurement mode in which gas to be detected discharged from the column flows into the sensor, and a discharge mode in which gas to be detected discharged from the column is discharged to the outside.
A gas component detection device comprising:
Dependencies are inferred from the claim text.