Semiconductor device and method for manufacturing semiconductor device
OwnerHideto TAKEKIDAinventor
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OwnerHideto TAKEKIDAinventor
Estimating the term…
A semiconductor device includes a first substrate and a plurality of electrode layers above the first substrate and separated from each other in a first direction. The device includes a plurality of plugs provided on upper surfaces or lower surfaces of the plurality of electrode layers and a plurality of columnar portions in the plurality of electrode layers and extending in the first direction. A charge storage layer is between a semiconductor layer of the columnar portions and the electrode layers. A second substrate is provided above the plurality of electrode layers. A plurality of first transistors is provided on an upper surface of the first substrate and are electrically connected to the plurality of plugs. A plurality of second transistors is provided on a lower surface of the second substrate and are electrically connected to the plurality of columnar portions.
A semiconductor device, comprising:
A method for manufacturing a semiconductor device comprising:
Dependencies are inferred from the claim text.