Gas distribution assembly including positioning device
AssigneeASM IP Holding B.V.
InventorsWei Chen Liao, Vincent Hubert Bernard Gilles Babin
Life of this patent
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Abstract
A gas distribution assembly and method for reducing the eccentricity between a shower plate and an exhaust duct are disclosed. The gas distribution assembly includes positioning devices configured to reduce misalignment between the shower plate and the exhaust duct. The gas distribution assembly and method can be used to improve uniformity of film deposition thickness.
Claims20
A gas distribution assembly for distributing a gas to a reaction chamber comprising:
- an exhaust duct comprising an outer surface and a top surface;
- a shower plate comprising a rim, wherein the rim comprises an outer surface and a bottom surface, and wherein the bottom surface of the rim is adjacent to the top surface of the exhaust duct;
- and
- five or more positioning devices connected to the exhaust duct adjacent to the outer surface of the rim,
- wherein the positioning devices are configured to reduce misalignment between the shower plate and the exhaust duct.
A gas distribution assembly for distributing a gas to a reaction chamber comprising:
- an exhaust duct comprising an outer surface and a top surface;
- a shower plate comprising a rim, wherein the rim comprises an outer surface and a bottom surface, and wherein the bottom surface of the rim is adjacent to the top surface of the exhaust duct;
- and
- one or more positioning devices, wherein each positioning device comprises a stopper and an attachment device,
- wherein the one or more positioning devices are connected to the outer surface of the exhaust duct adjacent to the outer surface of the rim,
- wherein the one or more positioning devices are configured to reduce misalignment between the shower plate and the exhaust duct.
A method of facilitating alignment between a shower plate and an exhaust duct in a gas distribution assembly, the method comprising:
- providing an exhaust duct comprising an outer surface and a top surface;
- providing a shower plate comprising a rim, wherein the rim comprises an outer surface and a bottom surface, and wherein the bottom surface of the rim is adjacent to the top surface of the exhaust duct;
- and
- attaching one or more positioning devices to the outer surface of the exhaust duct adjacent to the outer surface of the rim, wherein the one or more positioning devices comprises, a stopper and an attachment device;
- wherein attaching the one or more positioning devices facilitates alignment between the shower plate and the exhaust duct.
Dependencies are inferred from the claim text.