Method for manufacturing high-density three-dimensional programmable memory
AssigneeChengdu Pbm Technology Ltd.
InventorJACK ZEZHONG PENG
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AssigneeChengdu Pbm Technology Ltd.
InventorJACK ZEZHONG PENG
Estimating the term…
A method for manufacturing a high-density three-dimensional programmable memory, relating to the memory manufacturing technology, comprises the following steps: 1) forming a base structure; 2) grooving the base structure; 3) disposing, storage medium layers required by a preset memory structure layer by layer on an inner wall of the division groove; 4) filling a core medium in the division groove to form a core medium layer; 5) etching, through a mask etching process, to form deep holes along the separation division groove filled with the core where the deep holes truncate the core medium in the division groove; and 6) filling an insulation medium in the deep holes. The method has the beneficial effects of low costs and the highest storage density.
A method for manufacturing a high-density three-dimensional programmable memory, comprising:
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