Precursor delivery systems, precursor supply packages, and related methods
AssigneeEntegris, Inc.
InventorPaolo Moreschini
Life of this patent
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Abstract
Some embodiments relate to precursor delivery systems for producing gas precursors. The precursor delivery system may include one or more precursor supply packages containing a solid precursor material. The one or more precursor supply packages may be configured to heat the solid precursor material to a temperature sufficient to result in thermal decomposition of the solid precursor material. The thermal decomposition of the solid precursor material may produce a gas precursor. The gas precursor may be supplied to a gas precursor-utilizing process. Further embodiments relate to precursor supply packages and related methods.
Claims20
A precursor supply package comprising:
- a vessel body containing a solid precursor material;
- a heater configured to heat the vessel body to a temperature sufficient to produce a gas precursor by thermal decomposition of the solid precursor material, wherein the gas precursor comprises PF5;
- and
- an outlet fluidly connected to the vessel body.
A precursor delivery system comprising:
- a plurality of precursor supply packages, each of the plurality of precursor supply packages comprising:
- a vessel body containing a solid precursor material;
- a heater configured to heat the vessel body to a temperature sufficient to produce a gas precursor by thermal decomposition of the solid precursor material wherein the gas precursor comprises PF5;
- and
- an outlet fluidly connected to the vessel body;
- a manifold fluidly connected to the plurality of precursor supply packages;
- and
- an outlet fluidly connected to the manifold.
A method of supplying a gas precursor, comprising:
- obtaining a first vessel containing a solid precursor material,
- heating the first vessel to a temperature sufficient to result in thermal decomposition of the solid precursor material to produce a gas precursor comprising PF5;
- and
- supplying the gas precursor from the first vessel to a downstream process.
Dependencies are inferred from the claim text.