Systems and methods for rotational calibration of metrology tools
OwnerAlexander Novikov, Amnon Manassen +5inventors
InventorsAlexander Novikov, Amnon Manassen, Ido Dolev, Yuri Paskover, Nir Ben David, Yoel Feler, Yoram Uziel
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Abstract
A system and method for generating an angular calibration factor (ACF) for a metrology tool useful in a fabrication process, the method including providing the metrology tool, the metrology tool including a stage and a housing, measuring a rotational orientation of the stage relative to the housing and generating the ACF for the stage based at least partially on the rotational orientation.
Claims23
A method of generating an angular calibration factor (ACF) for a metrology tool useful in a fabrication process, the method comprising:
- providing said metrology tool, said metrology tool comprising:
- a stage;
- and
- a housing;
- measuring a rotational orientation of said stage relative to said housing;
- and
- generating said ACF for said stage based at least partially on said rotational orientation.
A system for generating an angular calibration factor (ACF), the system comprising:
- a metrology tool comprising:
- a stage;
- and
- a housing;
- and
- an angle monitoring sub-system (AMSS) operative to measure a rotational orientation of said stage relative to said housing and to generate said ACF based at least partially on said rotational orientation.
Dependencies are inferred from the claim text.