Semiconductor device segmented interconnect
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yu LAI, Chih-Liang CHEN, Ching-Wei TSAI, Shang-Wen CHANG, Li-Chun TIEN
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yu LAI, Chih-Liang CHEN, Ching-Wei TSAI, Shang-Wen CHANG, Li-Chun TIEN
Estimating the term…
A semiconductor device includes a base isolation layer, a first transistor with a first source electrode at a first side of the base isolation layer. A bridge pillar extends through the base isolation layer, and a metal electrode electrically connects the bridge pillar to the first source electrode. The metal electrode and the first source electrode are at the same side of the base isolation layer. A second metal electrode at an opposite side of the base isolation layer electrically connects to the bridge pillar and to a conductive line at the second side of the base isolation layer.
A semiconductor device, comprising:
A method of making a semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.