Hermetically packaged scanning mirror in low humidity environment and manufacturing method thereof

A method of making a scanning mirror apparatus, the method comprising:

• providing a hermetic package having an internal cavity formed therein;
• disposing a micro-mirror device with a reflective mirror surface disposed inside the internal cavity;
• disposing a gaseous species with predetermined index value of humidity content and pressure disposed inside the internal cavity;
• disposing an optical transparent window disposed on the hermetic package bonded by glass frit bonding or metal bonding covering the internal cavity, the optical transparent window containing the gaseous species inside the internal cavity;
• and
• disposing at least one metal pin for providing a signal, power, or ground to the micro-mirror device, attached to the hermetic package by glass frit bonding.