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US 2023/0067667 A1Published application
Biosensor structure, biosensor system, and method for forming biosensor
AssigneeVisEra Technologies Company Limited
InventorsYi-Hua CHIU, Hsin-Yi HSIEH, Wei-Ko WANG
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Abstract
A biosensor structure is provided. The biosensor structure includes a substrate, an insulating layer, a semiconductor layer and a gold disc. The insulating layer is disposed on the substrate. The semiconductor layer is disposed on the insulating layer, and a well is disposed in the semiconductor layer. The gold disc is disposed at bottom of the well.
Claims20
A biosensor structure, comprising:
- a substrate;
- an insulating layer disposed on the substrate;
- a semiconductor layer disposed on the insulating layer, wherein a well is disposed in the semiconductor layer;
- and
- a gold disc disposed at bottom of the well.
2 more elements
A biosensor system, comprising:
- a biosensor structure, comprising:
- a substrate;
- an insulating layer disposed on the substrate;
- a semiconductor layer disposed on the insulating layer, wherein a well is disposed in the semiconductor layer;
- and
- a gold disc disposed at bottom of the well;
- and
- a detector structure for detecting the biosensor structure.
5 more elements
A method for forming a biosensor structure, comprising:
- providing a substrate;
- forming an insulating layer on the substrate;
- forming a semiconductor layer disposed on the insulating layer;
- forming a gold disc on a top surface of the semiconductor layer, wherein a location of the gold disc defines a position of a well;
- and
- forming the well in the semiconductor layer using an etching process, while the gold disc remains at bottom of the well.
3 more elements
Dependencies are inferred from the claim text.