Voltage pulse time-domain multiplexing

An apparatus for generating a plasma, comprising:

• a processing chamber
• a voltage waveform generator configured to deliver a voltage waveform to an electrode disposed within the processing chamber, the voltage waveform generator comprising:
• voltage source circuitry;
• and
• one or more switches coupled to the voltage source circuitry, wherein the one or more switches include:
• a first switch coupled between the voltage source circuitry and a first output node of the waveform generator, the first output node being configured to be coupled to the electrode;
• a second switch coupled between the first output node and electrical ground node;
• a third switch coupled between the voltage source circuitry and a second output node of the waveform generator, the second output node being configured to be coupled to the electrode;
• and
• a fourth switch coupled between the second output node and the electrical ground node, and
• a system controller configured to control the one or more switches.

A plasma processing system comprising:

• a voltage waveform generator configured to deliver a voltage waveform to a chamber of the plasma processing system, the voltage waveform generator comprising:
• a first voltage source circuitry included in a first pulsed waveform (PV) source assembly;
• a second voltage source circuitry included in a second PV source assembly;
• a first pair of switches coupled to the first voltage source circuitry comprising a first switch coupled between the first voltage source circuitry and a first output node configured to be coupled to the chamber and a second switch coupled between the first output node and electrical ground node;
• and
• a second pair of switches coupled to the first voltage source circuitry comprising a third switch coupled between the first voltage source circuitry and a second output node configured to be coupled to the chamber and a fourth switch coupled between the second output node and electrical ground node;
• a third pair of switches coupled to the second voltage source circuitry comprising a fifth switch coupled between the second voltage source circuitry and a third output node configured to be coupled to the chamber and a sixth switch coupled between the third output node and electrical ground node;
• a fourth pair of switches coupled to the second voltage source circuitry comprising a seventh switch coupled between the second voltage source circuitry and a fourth output node configured to be coupled to the chamber and an eighth switch coupled between the fourth output node and electrical ground node.