Micro-electromechanical system device using a metallic movable part and methods for forming the same

A micro-electromechanical system (MEMS) device comprising:

• a movable comb structure located in a cavity within an enclosure and comprising:
• a comb shaft portion;
• and
• movable comb fingers laterally protruding from the comb shaft portion, wherein the movable comb structure comprises a first metallic material portion;
• and
• a stationary structure affixed to the enclosure and comprising a second metallic material portion having a same material composition as the first metallic material portion,
• wherein the movable comb structure and the stationary structure are configured to generate an electrical output signal based on a change in capacitance between the movable comb structures and the stationary structure.

A method of forming a micro-electro mechanical system (MEMS) device, comprising:

• forming a first trench and a second trench in a semiconductor matrix material layer;
• depositing at least one trench fill material in the first trench and the second trench, wherein the at least one trench fill material comprises a metallic material;
• and
• removing a portion of the semiconductor matrix material layer around the first trench and the second trench, wherein portions of the at least one trench fill material in the first trench comprise a movable comb structure, and portions of the at least one trench fill material in the second trench comprise a stationary structure, and wherein the movable comb structure and the stationary structure are configured to generate an electrical output signal based on a change in capacitance between the movable comb structures and the stationary structure.