System and method for testing a filter
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCHWEN YU, EN TIAN LIN, CHI WEN KUO
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Abstract
A system and a method for testing a filter used in ultrapure water are provided. The method for testing a filter, which is used for removing particles from ultrapure water, comprises: providing a testing solution with particles; detecting the particles in the testing solution by a particle counter; passing the testing solution through a filter; and detecting the particles in the testing solution, which is passed through the filter, by another particle counter.
Claims20
A method for testing a filter comprising:
- providing a first testing solution with a number of particles;
- detecting the number of the particles in the first testing solution by a first particle counter;
- passing the first testing solution through a filter;
- detecting the number of the particles in the first testing solution, which is passed through the filter, by a second particle counter;
- and
- calculating a first data detected by the first particle counter and a second data detected by the second particle counter to obtain a filter retention efficiency of the filter.
A method for testing a particle counter:
- preparing a first testing solution with a first number of particles, wherein the first number of the particles is known;
- detecting the first testing solution by the particle counter so as to obtain a first data;
- and comparing the first data with the first number to check consistency between the first number of the particles in the first testing solution and the first data detected by the particle counter.
A system for testing a filter comprising:
- a container configured to receive a testing solution;
- a first passageway in fluid communication with the container;
- a second passageway connecting to the first passageway, wherein the filter is arranged between the first passageway and the second passageway;
- a first particle counter connected to the first passageway;
- and
- a second particle counter connected to the second passageway.
Dependencies are inferred from the claim text.