Test apparatus for semiconductor package
AssigneeTse Co., Ltd.
InventorsSol Lee, Min Cheol Kim
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AssigneeTse Co., Ltd.
InventorsSol Lee, Min Cheol Kim
Estimating the term…
An apparatus for testing a package-on-package type semiconductor package includes an upper test socket on which an upper package is mounted, the upper test socket being mounted on a pusher and connected to the lower package; a lower test socket mounted on a tester and connected to the lower package; and an adsorption pad coupled to the pusher and configured to adsorb and pressurize the lower package using a vacuum pressure, wherein the adsorption pad comprises a body part having a vacuum pressure passage formed therein; and an adsorption part having an adsorption hole corresponding to the vacuum pressure passage, and the body part is attached on a central portion of an upper surface of the adsorption part and an outer oil overflow-preventing part configured to trap silicon oil eluted from the body part is formed at an outer periphery the adsorption part.
An apparatus for a semiconductor package, configured to test a package-on-package type semiconductor package, comprising:
7-8. (canceled)
An apparatus for a semiconductor package, configured to test a package-on-package type semiconductor package, comprising:
Dependencies are inferred from the claim text.