Semiconductor package and method of manufacturing the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu-Chun Tang, Chung-Hao Tsai, Chuei-Tang Wang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu-Chun Tang, Chung-Hao Tsai, Chuei-Tang Wang
Estimating the term…
A semiconductor package is provided. The semiconductor package includes a first die and a second die bonded to the first die. An encapsulant laterally encapsulates the second die. Through vias are disposed in the encapsulant. An interconnect structure is disposed on the second die, the through vias and the encapsulant. A redistribution structure is disposed on the interconnect structure. An inductor is embedded in the redistribution structure and the interconnect structure, wherein the inductor includes a portion of a metallization pattern of the redistribution structure and a portion of a conductive pattern of the interconnect structure. The portion of the metallization pattern of the inductor is adjacent to and substantially overlapped with the portion of the conductive pattern of the inductor. A manufacturing method of a semiconductor package is also provided.
A semiconductor package comprising:
A semiconductor package comprising:
A method of manufacturing a semiconductor package comprising:
Dependencies are inferred from the claim text.