Image sensor for time-of-flight system and methods of making the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYeh-Hsun FANG, Zhi-Wei ZHUANG, Li-Hsin CHU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYeh-Hsun FANG, Zhi-Wei ZHUANG, Li-Hsin CHU
Estimating the term…
An image sensor for a Time-of-Flight imaging system is disclosed that includes at least one primary sensor having a photodetector that includes a photovoltaic junction formed at least partially in a germanium-containing material that includes germanium at an atomic percentage greater than 50%, and at least one secondary sensor having a photodetector that includes a photovoltaic junction formed in a second material, such as a silicon-containing material, that includes germanium at an atomic percentage between 0% and 50%. The primary sensor may detect Time-of-Flight measurement signals and the secondary sensor may detect background light, such as sunlight, to correct for background light interference.
A Time-of-Flight imaging system, comprising:
An image sensor for a Time-of-Flight imaging system, comprising:
A method of fabricating an image sensor for a Time-of-Flight imaging system, comprising:
Dependencies are inferred from the claim text.