Integrated circuit with backside conductive layers
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTe-Hsin CHIU, Shih-Wei PENG, Wei-Cheng LIN, Jiann-Tyng TZENG, Jiun-Wei LU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTe-Hsin CHIU, Shih-Wei PENG, Wei-Cheng LIN, Jiann-Tyng TZENG, Jiun-Wei LU
Estimating the term…
An integrated circuit includes multiple backside conductive layers disposed over a backside of a substrate. The multiple backside conductive layers each includes conductive segments. The conductive segments in at least one of the backside conductive layers are configured to transmit one or more power signals. The conductive segments of the multiple backside conductive layers cover select areas of the backside of the substrate, thereby leaving other areas of the backside of the substrate exposed.
An integrated circuit comprising a cell, comprising:
An integrated circuit comprising a cell, comprising:
A method, comprising:
The method of claim 17, wherein the forming of the first backside conductive layer comprises forming a respective conductive segment in the first plurality of conductive segments to contact directly a respective conductive segment in the second plurality of conductive segments.
The method of claim 17, further comprising forming a conductive contact between a respective conductive segment in the first plurality of conductive segments and a respective conductive segment in the second plurality of conductive segments.
The method of claim 17, further comprising:
Dependencies are inferred from the claim text.