Piezoelectric Element, Liquid Ejecting Head, And Liquid Ejecting Apparatus
AssigneeSeiko Epson Corporation
InventorKazuya KITADA
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Abstract
A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked on a substrate is provided. The piezoelectric element is a piezoelectric element in which the first electrode, the piezoelectric layer, and the second electrode are stacked in order on the substrate and includes an orientation control layer that is provided between the piezoelectric layer and the first electrode and that controls orientation of the piezoelectric layer and a titanium layer that is provided between the first electrode and the orientation control layer and that contains at least Ti.
Claims20
A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked in order on a substrate, the piezoelectric element comprising:
- an orientation control layer that is provided between the piezoelectric layer and the first electrode and controls orientation of the piezoelectric layer;
- and
- a titanium layer that is provided between the first electrode and the orientation control layer and contains at least Ti.
A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked in order on a substrate, the piezoelectric element comprising:
- an orientation control layer that is provided between the piezoelectric layer and the first electrode and controls orientation of the piezoelectric layer;
- and
- a canceling layer that is provided between the first electrode and the orientation control layer and has a function of canceling an influence of orientation which is applied from the first electrode to the piezoelectric layer.
Dependencies are inferred from the claim text.