Reference sample for a microscope, methods and uses
AssigneeCarl Zeiss Microscopy GmbH
InventorsVolker DOERING, Andreas SEHER
Life of this patent
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Abstract
A reference sample for calibrating and/or adjusting a microscope and to uses of the reference sample. The latter has at least one carrier structure made of a carrier material which, at least in regions of its extent, is excitable to emit luminescence light, and at least one two-dimensional and/or three-dimensional structure consisting of a number of substructures. The carrier material is diamond or silicon carbide and is doped in or around the regions of the two-dimensional and/or three-dimensional structure in order to be excitable to emit the luminescence light.
Claims13
A reference sample for calibrating and/or adjusting a microscope, comprising:
- having-at least one carrier structure made of a carrier material which, at least in regions of its extent, is excitable to emit luminescence light,
- wherein the carrier material has at least one two-dimensional and/or three-dimensional structure which is predetermined in terms of its dimensions and shape and consists of a number of substructures,
- the carrier material is diamond or silicon carbide;
- the carrier material is doped in or around the regions of the two-dimensional and/or three-dimensional structure in order to be excitable to emit the luminescence light;
- and
- the respective substructure is formed laterally and/or axially as an area, as points, as a three-dimensional structure or as a combination of at least two line sections, wherein a lateral substructure extends on or under a surface of the reference sample and substantially parallel thereto, while an axial substructure extends in or obliquely to a z-direction into the carrier material.
Dependencies are inferred from the claim text.