Method of Forming and Controlling Morphology of Cracks in Silicon Dioxide Film
Assignee2M Technology, LLC
InventorZhihong Liu
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Assignee2M Technology, LLC
InventorZhihong Liu
Estimating the term…
Methods for forming and controlling morphology cracks in silicon dioxide (SiO2) film comprising: preparing SiO2precursor solution comprising solvent, precursor of SiO2, precursor of metal oxide nanocrystals, water, and acid; coating the solution onto substrate; drying the solution atop the substrate at a temperature between about 20° C. to 100° C. between 1 minute to 24 hours to form SiO2 film having uniformly dispersed metal oxide nanocrystals, wherein shorter drying times yield substantially spherical shaped metal oxide nanocrystals and longer drying times yield rod and disc shaped metal oxide nanocrystals; and thermally treating the SiO2 film between about 60° C. to 500° C. between 1 minute to 24 hours to form cracked mesh SiO2 film, wherein two cracks initiate from rod shaped metal oxide nanocrystals, three to four cracks initiate from spherical shaped metal oxide nanocrystals, and four or more cracks initiate from disc shaped metal oxide nanocrystals. Other embodiments are described and claimed.
A method of forming and controlling morphology of cracks in silicon dioxide film, the method comprising:
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