A method for manufacturing a material layer comprising lithium (Li), the method being carried out using equipment comprising:
- a chamber, within which composition and pressure of the gas are controllable, and handling of the materials is performed in controlled conditions and under controlled gas atmosphere, the handling comprises bringing materials into the volume limited by the chamber walls and removing from the volume limited by the chamber walls,
- at least one laser source, which generates a laser beam,
- at least one optical component, which is utilised to affect optical properties of the laser beam,
- at least one optical component, which is utilised to change direction of the laser beam,
- at least one lithium-comprising target is setup in the chamber,
- a device, which is utilised to move the target located inside the chamber,
- a selected surface area on the target is arranged for process by the laser beam,
- at least one laser beam is directed to hit the surface of the lithium-comprising target and to detach lithium-comprising material from the target so that material is detached from a desired area on the surface of the target by means of movement of the target and/or controlling the laser beam,
- a substrate to be coated is setup in the chamber,
- a device, which is utilised to move the substrate located inside the chamber,
- the substrate is controlled such that lithium-comprising material detached by laser ablation from the target is hitting on the desired surface area on the surface of the substrate,
- a measurement device, which is utilised to measure the electromagnetic radiation generated by laser ablation;
- the method comprising the following steps:
- forming a lithium-comprising layer of selected thickness, on said surface area on the surface of the substrate,
- processing and modifying the formed lithium-comprising layer by thermal treatment, by laser light, or mechanically, by a device configured to process and modify materials, and
- adjusting energy delivered to the target by the laser beam and/or adjusting the surface area of the laser spot on the target surface based on the measurement of the electromagnetic radiation generated by the laser ablation during the detachment of the material.