Wafer cleaning device and wafer cleaning system
AssigneeChangxin Memory Technologies, Inc.
InventorFeng ZHANG
Life of this patent
Estimating the term…
Loading patent…
AssigneeChangxin Memory Technologies, Inc.
InventorFeng ZHANG
Estimating the term…
The present disclosure relates to the technical field of wafer cleaning, and in particular to a wafer cleaning device and a wafer cleaning system. The wafer cleaning device includes a liquid inlet pipe, a first liquid discharge pipe, a first valve and a liquid supply device, wherein the liquid inlet pipe has an inlet terminal and an outlet terminal; a wall of the liquid inlet pipe is protruded outward to form a protrusion, the protrusion having a cavity; one terminal of the first liquid discharge pipe is communicated with the cavity, while the other terminal thereof is communicated with a container; the first valve is arranged on the liquid inlet pipe and located between the protrusion and the outlet terminal; and, the liquid supply device is communicated with the inlet terminal of the liquid inlet pipe to import cleaning solution into the liquid inlet pipe.
A wafer cleaning device, comprising:
A wafer cleaning system, comprising:
Dependencies are inferred from the claim text.