Dielectric coated lithium metal anode
AssigneeApplied Materials, Inc.
InventorsSubramanya P. HERLE, David Masayuki ISHIKAWA
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AssigneeApplied Materials, Inc.
InventorsSubramanya P. HERLE, David Masayuki ISHIKAWA
Estimating the term…
Methods for forming anode structures are provided and include transferring a flexible substrate a first deposition chamber arranged downstream from a first spool chamber, the first deposition chamber containing a first coating drum capable of guiding the flexible substrate past a first plurality of deposition units, and guiding the flexible substrate past the first plurality of deposition units while depositing a lithium metal film on the flexible substrate via the first plurality of deposition units. The method also includes transferring the flexible substrate from the first deposition chamber to a second deposition chamber, the second deposition chamber containing a second coating drum capable of guiding the flexible substrate past a second deposition unit containing a crucible capable of depositing ceramic on the lithium metal film, and guiding the flexible substrate past the crucible while depositing a ceramic protective film on the lithium metal film via the evaporation crucible.
A method, comprising:
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.