Egfr inhibitors

A compound of Formula (I):

• or a pharmaceutically acceptable salt thereof, wherein:
• Z is O or NH;
• each A1, A2, and A3 is independently N or CR;
• wherein each R is independently H, halogen, or CH3;
• Ring A is 4-12 membered heterocyclyl;
• each R1 is independently halogen, CN, OH, NRaRb, C1-C4 alkyl, C1-C4 alkoxy, C3-C6 cycloalkyl or —O—C3-C6 cycloalkyl, wherein the alkyl, alkoxy or cycloalkyl represented by R1 or in the group represented by R1 is optionally substituted with 1 to 3 groups selected from deuterium, halogen, OH, NRaRb, C1-C2 alkyl, and C1-C2 alkoxy;
• and/or
• m is 0, 1, 2, 3, 4, 5, or 6;
• R2 is H, halogen, C1-C4 alkyl, C1-C4 alkoxy, or C3-C6 cycloalkyl, wherein the alkyl, alkoxy or cycloalkyl represented by R2 is optionally substituted with 1 to 3 groups selected from halogen and OH;
• R3 is H or methyl;
• R4 is H or methyl;
• R5 is H, C1-C4 alkyl, C3-C6 cycloalkyl or 4-6 membered monocyclic heterocyclyl, wherein the alkyl, cycloalkyl or heterocyclyl represented by R5 is optionally substituted with 1 to 3 three groups selected from halogen, CN, OH, NRaRb, C1-C2 alkyl, and C1-C2 alkoxy;
• R6 is H or C1-C4 alkyl optionally substituted with 1 to 3 three groups selected from halogen, CN, OH, NRaRb, and C1-C2 alkoxy;
• and
• each Ra and Rb is independently H or C1-C4 alkyl.