Pressure detection structure and electronic device
AssigneeHuawei Technologies Co., Ltd.
InventorsWenbo LI, Xinyu XU
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AssigneeHuawei Technologies Co., Ltd.
InventorsWenbo LI, Xinyu XU
Estimating the term…
A pressure detection structure and an electronic device are provided that improve sensitivity and accuracy of pressure detection. The pressure detection structure includes: N piezo-resistors connected at the first dielectric layer to form a Wheatstone bridge, where an opening of a first cavity is provided on the first surface of the substrate. The two ends, in a first direction, of the vertical projection of a first piezo-resistor among the N piezo-resistors on a contact surface between the N piezo-resistors and the first dielectric layer are located respectively on the two sides, in the first direction, of the vertical projection of the first cavity on the contact surface. The long side of a second piezo-resistor among the N piezo-resistors is perpendicular to the first direction, and the vertical projection of the second piezo-resistor on the contact surface does not overlap with the vertical projection of the first cavity.
1-38. (canceled)
An electronic device comprising:
A pressure detection structure, wherein the pressure detection structure comprises:
Dependencies are inferred from the claim text.