Semiconductor structure and method for preparing same
AssigneeChangxin Memory Technologies, Inc.
InventorsTIEH-CHIANG WU, Lingxin Zhu
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AssigneeChangxin Memory Technologies, Inc.
InventorsTIEH-CHIANG WU, Lingxin Zhu
Estimating the term…
Provided are a semiconductor structure and method for preparing same. The semiconductor structure includes a gate, a source or a drain being provided in the substrate at either side of the gate; a dielectric layer; a contact structure; a first electrical connection part and a second electrical connection part arranged at intervals. The second electrical connection part is in contact with a partial top surface of the contact structure. The first electrical connection part includes a first barrier layer and a first conductive layer which are stacked. In a direction from the source to the drain, a distance between the sidewall of the first barrier layer facing the contact structure and the contact structure is a first distance, and a distance between the sidewall of the first conductive layer facing the contact structure and the contact structure is a second distance, the first distance being greater than the second distance.
A semiconductor structure, comprising:
A method for preparing a semiconductor structure, comprising:
Dependencies are inferred from the claim text.