Leak test device

Abstract

The present disclosure provides a leak test device, including: a test platform, the test platform being configured to carry and place a polishing head to be tested for leak, the polishing head being divided into one or more independent partitions, each of the partitions having a chamber correspondingly, and each chamber having vents correspondingly; an upper cover for sealing the chambers, the upper cover being located on the side of the chambers away from the test platform; and a movable device, the movable device being movable on a surface parallel to the test platform, movable in a direction perpendicular to the test platform, and also adapted to apply pressure on the upper cover so that the upper cover seals the chambers.

Dependencies are inferred from the claim text.