US 2023/0054584 A1 · FACTORY INTERFACE WITH REDUNDANCY

Abstract

A substrate processing system for an electronic device manufacturing system can include a factory interface forming an interior volume, and a partition disposed in the factory interface. The partition can divide the interior volume into a first factory interface chamber forming a second interior volume, and a second factory interface chamber forming a third interior volume. The partition can be configured to provide a first sealed environment in the first factory interface chamber and a second sealed environment in the second factory interface chamber.

Claims24

Dependent claims

A substrate processing system, comprising:

a factory interface forming an interior volume;
a partition disposed in the factory interface, wherein the partition divides the interior volume into a first factory interface chamber forming a second interior volume, and a second factory interface chamber forming a third interior volume, wherein the partition is configured to provide a first sealed environment in the first factory interface chamber and a second sealed environment in the second factory interface chamber.

An electronic device manufacturing system, comprising:

a first factory interface subsystem;
a second factory interface subsystem;
a partition positioned so as to be between the first factory interface subsystem and the second factory interface subsystem, wherein the partition comprises an opening;
a first load lock coupled to a backside of the first factory interface subsystem;
a second load lock coupled to a backside of the second factory interface subsystem;
a first factory interface robot disposed within an interior volume of the first factory interface subsystem;
and
a second factory interface robot disposed within an interior volume of the second factory interface subsystem, wherein:
the first factory interface robot is configured to transfer a substrate to the second factory interface robot via the opening in the partition.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/884,088Filed 9 Aug 2022

Priority

18 Aug 2021

Published

23 Feb 2023

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

B25J 21/005
Chambers provided with manipulation devices: clean rooms
F24F 3/167
By purification, e.g. by filtering; by sterilisation; by ozonisation: clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is…
H05K 13/0061
Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components: tools for holding the circuit boards…
H10P 72/0451
Apparatus for manufacture or treatment: apparatus for manufacturing or treating in a plurality of work-stations

Factory interface with redundancy

Life of this patent

Factory interface with redundancy

Life of this patent

Abstract

Claims24