Laser processing device and laser processing method

4:

• The laser processing apparatus according to claim 2, wherein
• the controller, at execution of the first process, causes the driving portion to move at least one of the support portion and the condenser lens in such a way as to make the support portion or the condenser lens follow displacement of the laser light incident surface while moving at least the support portion or the emission portion so that the focusing position moves along the peripheral edge, wherein
• the measurement data acquiring portion, at execution of the first process, stores a control signal value inputted to the driving portion when the driving portion moves at least one of the support portion and the condenser lens in such a way as to make the support portion or the condenser lens follow displacement of the laser light incident surface, as the measurement data associated with the position information, wherein
• the controller, at execution of the second process,
• reads the control signal value that is inputted when the support portion or the condenser lens has been caused to follow displacement of an intersection of the annular line and a first linear line by the first process,
• moves at least one of the support portion and the emission portion so that the focusing position moves from outside of the object to inside thereof along the first linear line, thereby forming the second modified region in the peripheral part, and before or when the focusing position moves outside of the object to inside thereof, controls the driving portion by the read control signal value, thereby moving at least one of the support portion and the condenser lens to a first initial position, and wherein
• the controller reads the control signal value that is inputted when the support portion or the condenser lens has been caused to follow displacement of an intersection of the annular line and a second linear line by the first process,
• moves at least one of the support portion and the emission portion so that the focusing position moves from outside of the object to inside thereof along the second linear line, thereby forming the second modified region in the peripheral part, and before or when the focusing position moves outside of the object to inside thereof, controls the driving portion by the read control signal value, thereby moving at least one of the support portion and the condenser lens to a second initial position.

5:

• The laser processing apparatus according to claim 1, wherein
• the controller,
• at execution of the first process, forms the first modified region along an annular line along a peripheral edge of the object, and,
• at execution of the second process, forms the second modified region along a linear line intersecting the annular line, the second modified region being on an inner part of the object that is inside the first modified region in a view from the laser light incident surface.

7:

• The laser processing apparatus according to claim 1, wherein
• the controller,
• at execution of the first process, forms the first modified region along an annular line along the peripheral edge of the object, and,
• at execution of the second process, forms the second modified region along a virtual plane inside the object.

12:

• A laser processing method of emitting a laser light onto an object to form a modified region inside the object, the method comprising:
• a first step of moving at least one of a support portion and an emission portion, the support portion configured to support the object and the emission portion emitting the laser light onto the object via a condenser lens, so that inside a peripheral edge of the object, a focusing position of the laser light moves along the peripheral edge, thereby forming a first modified region inside the object along the peripheral edge;
• and
• a second step to be executed following the first step, the second step moving at least one of the support portion and the emission portion so that the focusing position moves from outside of the object to inside thereof, thereby forming a second modified region inside the object, wherein
• at the first step,
• measurement data associated with position information on a position of the object is acquired, the measurement data being data on displacement of a laser light incident surface of the object, the laser light incident surface being exposed to the laser light incident thereon, and on displacement of a support surface of the support portion, the support surface supporting the object, and wherein
• at the second step,
• a driving portion shifts a position of at least one of the support portion and the condenser lens, the position being along a direction of an optical axis of the condenser lens, to an initial position based on the measurement data acquired at the first step, before or when the focusing position moves from outside of the object to inside thereof.